EpiGaN Acquires New Equipment to Increase GaN Epiwafer Production

GaN technology pioneer, EpiGaN, has chosen an Aixtron G5+C tool to meet the growing demand from their global customer base. Headquartered in Hasselt/Belgium, EpiGaN is a global supplier of GaN-on-Si and GaN-on-SiC material product solutions for next-generation semiconductor devices. The company has selected Aixtron’s G5+C MOCVD system to boost its manufacturing capability of large-diameter GaN-on-Si and GaN-on-SiC epiwafers.

The new AIXTRON AIX G5+C reactor will be installed at EpiGaN’s manufacturing site in Hasselt/Belgium and operational in Q1/2019. The fully automated Planetary MOCVD system features in-situ chamber cleaning and enables configurations of 8x6 inch, or 5x8 inch epitaxial wafers to be automatically loaded and removed from the system in an enclosed cassette environment.

The demand from EpiGaN’s global customer base for GaN product solutions is booming. Key customers, according to the company, are getting ready to launch and scale-up products based on their GaN RF-power technology, which is optimized for 5G broadband network applications. With Aixtron’s AIX G5+C planetary system EpiGaN is thus looking to increase its capacity for 150 mm and 200 mm product solutions to cope with the increasing market demands. Aixtron’s planetary system combines excellent on-wafer uniformity and run-to-run performance at the lowest cost of ownership –attributes that are critical to serve the customer base with products of exceptional performance and at the right price point.

Just recently EpiGaN released large-diameter versions of its HVRF (High Voltage Radio Frequency) GaN-on-Si, as well as GaN-on-SiC wafer product families tailored to demanding 5G applications needs. With the new Aixtron AIX G5+ MOCVD system the company expects to quickly scale up and spread out its differentiating technology solutions to the global market.

AIXTRON is a leading provider of deposition equipment to the semiconductor industry. Its technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and opto-electronic applications based on compound or organic semiconductor materials. Such components are used in a broad range of innovative applications, technologies and industries. These include laser and LED applications, display technologies, data transmission, SiC and GaN power management and conversion, communication, signaling and lighting as well as a range of other leading-edge technologies.