Probe Station & System by FormFactor Inc. | Visit website (12 more products)

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The SUMMIT200 from FormFactor is a 200 mm Semi/Fully-Automated Probe System for conducting high-accuracy measurements on single or volume wafers. It enables precision electrical measurements over temperature for ultra-low noise, DC, RF, mmWave, and THz applications, with the manual, semi-automatic, and fully-automatic operation. This advanced probe system uses PureLine™ technology to achieve very low noise levels and the patented AttoGuard® and MicroChamber® technologies to improve low-leakage and low-capacitance measurements. It has an advanced 200 mm fast stage with an advanced 4-axis semi-automatic stage for accurate positioning and repeatable probe-to-pad contact.

With a cassette handling capacity of up to 50 wafers, high throughput test features, and a wide temperature range of -60°C to +300°C, this system is ideal for scientists, engineers, and production operators in R&D, device characterization and modeling or niche production applications. It offers wide upgrade paths to meet any future needs and provides a fast, high-accuracy, and high-volume measurement platform for existing and future devices and ICs.

The SUMMIT200 supports Contact Intelligence™ which is a unique technology that ensures proper wafer contact. It uses a powerful combination of innovative system design and state-of-the-art image processing to provide an operator-independent solution to achieve highly-reliable measurement data. This probe system allows thermally induced drift to be automatically corrected to enable automated temperature transitions over the full temperature range using VueTrack or ReAlign (the effective temperature range and minimum obtainable pad size depend on the probe card and probe card holder or positioner used).

Product Specifications

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Product Details

  • Part Number
  • Manufacturer
    FormFactor Inc.
  • Description
    Semi/Fully-Automated Probe System for DC/RF/mmWave/THz Applications

General Parameters

  • Chuck Size
    200 mm
  • Chuck Planarity
    ±10 um
  • Chuck Theta Coarse Travel
    ±7.5 Degree
  • Chuck Travel Range
    203 x 203 mm
  • Chuck Travel Resolution
    0.2 µm
  • Frequency
    DC to 1 GHz
  • Material
    Stainless steel
  • Measurements Type
    DC, RF
  • Microscope Travel Resolution
    1 µm
  • Microsope Movement Range
    35 mm
  • Connectors
  • Probe Station Dimensions
    74.5 x 63.5 x 20 mm
  • Type
    Automatic, Manual
  • Operating Temperature
    -55 to 200 Degree C

Technical Documents