452 MHz Bandwidth, High Rejection 5.6 GHz UNII XBAW Coexistence Filters Using Doped AlN-on-Silicon
Y. Shen, P. Patel, R. Vetury and J.B. Shealy
5.66 GHz bulk acoustic wave filters, utilizing doped aluminum nitride (AlN), are reported. The filters exhibit high -3 dB bandwidth of 452 MHz (8% fractional bandwidth), a minimum insertion loss of 1.79 dB, rejection greater than 50 dB and power handling performance (near the upper band edge) up to 32.5 dBm. Resonators show k2eff of 10.24%, Qmax of 1479, and FOM of 151.
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