Manufacturing Efficiency Improvement through MBE Recipe Optimization
Guoliang Zhou and Mark Borek
During the MBE growth process of a pHEMT structure, the growth of buffer layer and superlattice generally take more than 70 percent of the overall resources and time. This paper focuses on the reduction of the MBE growth time by optimizing the buffer and superlattice structures, discusses the challenges associated with thinning these layers, and reports results of overall manufacturing efficiency improvement at Skyworks.
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