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RIU002710K0-20TG Image

The RIU002710K0-20TG from RFHIC is a GaN RF Generator that operates from 25.8 to 28.5 MHz. It has 4 channels can can delivers an RF output power from 2.5 kW to 10 kW with an efficiency of up to 70%. The generator can provides continuous wave (CW) and pulse output power adjustable from 1W to 2500W at 27.12 MHz at each channel. It is ideal for microwave heating and drying, medical equipment, semiconductor equipment, PVD, PECVD and etch applications.

This generator is a combined-type RF generator system with an SSPA head and power supply unit. It is available in an 8U housing that measures 540 x 394 x 680 mm with a 1-5/8” EIA RF output port and HAN B (Harting) input port.

This RF generator requires an AC supply of 208 V and can be controlled via USB, D-net, RS-232/485 and EtherCat (CAT5 RJ-45) interfaces.

Product Specifications

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Product Details

  • Part Number
  • Manufacturer
  • Description
    4-Channel 10 kW GaN RF Generator from 25.8 to 28.5 MHz

General Parameters

  • Applications
    Microwave CVD, Plasma Generation, Bio-Chemistry, Heating, Drying, Semiconductor Equipment
  • Technology
    Solid State
  • Semiconductor Technology
  • Frequency
    25.8 to 28.5 MHz
  • CW/Pulse
    CW / Pulsed
  • Power
    2.5 to 10 kW
  • Efficiency
  • Cooling Type
    Water Cooled
  • Package Type
    Rack Mount
  • Interface
    USB, Ethernet
  • Output Interface
  • Connector
    1-5/8” EIA
  • Impedance
    50 Ohms
  • Voltage
    208 Vac
  • Dimension
    540 x 394 x 680 (W x H x D) 8U
  • Weight
    100 kg
  • Power Supply Type
  • Operating Temperature
    15 to 50 Degree C
  • RoHS
  • Note
    Channels: 4 ; Storage Temperature:10 to 40 Degree C

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